The laser interferometer is a precision instrument that uses the principle of laser interference to measure. It is widely used in measurements in various fields such as optics, machinery and electronics. Among them, measuring parallelism and perpendicularity is one of the important applications of laser interferometer.
Traditional measurement methods generally use mechanical or optical measurements, but these methods have disadvantages such as low precision, large errors, and sensitivity to environmental influences. The laser interferometer has the advantages of high precision, high sensitivity and non-contact, and can realize high precision measurement of parallelism and perpendicular.
Principle of measuring parallelism by laser interferometer
Parallelism measurement is an extensive application based on straightness measurement. Parallelism measurement includes two sets of straightness measurements on parallel axes. Please refer to the following parallelism measurement optical path principle component diagram. The straightness reflector serves as a common reference data and remains in place during the measurement process without adjustment. By subtracting the inclination θ2 of the second axis of movement from the inclination θ1 of the first axis of movement, we can obtain the parallelism = θ1 – θ2.
Configuring and applying parallelism measurement
The parallelism measurement configuration mainly consists of SJ6000 host computer, short straightness lens group (or long straightness lens group), SJ6000 static measurement software and other components. Measuring Z-axis parallelism requires the addition of an adjustable steering mirror.
Principle of verticality measurement by laser interferometer
Squareness measurement is the extension of straightness measurement into two dimensions. The verticality measurement consists of two sets of straightness measurements on orthogonal axes. For details, please see the main components diagram of the verticality measurement optical path below. The straightness reflector serves as a common reference data and remains in place during the measurement process without adjustment. An optical square is used in at least one of the straightness measurements to allow adjustment of the alignment of the laser beam on axis. Verticality error = optical quadratic error – slope θ1 – slope θ2.
Configuring and applying verticality measurement
The verticality measurement configuration mainly includes SJ6000 host computer, short straightness lens group (or long straightness lens group), verticality lens group (including optical square ruler), measurement software static SJ6000 and other components.
Advantages of laser interferometer measurement
1. High precision
SJ6000 laser interferometer adopts laser longitudinal dual mode thermal frequency stabilization technology, which can achieve high precision, strong anti-interference ability and good long-term stability of laser frequency output. The precision can reach the nanometer level and can accurately measure parallelism and. perpendicular. Small changes.
2. Contactless
The SJ6000 laser interferometer does not need to contact the measured object, will not affect the measured object, and will not cause errors due to wear.
3. Fast and stable
SJ6000 laser interferometer adopts high-speed interference signal acquisition, conditioning and subdivision technology, which can achieve a high measurement speed of 4m/s and nanometer-level resolution. The measurement speed is very fast, the interference mirror is designed to be separated from the interference mirror. Host to prevent the interference mirror from being heated. The interference light path is stable and reliable, ensuring long-term stable measurement.
4. Wide range of applications
The laser interferometer can detect linear positioning accuracy, repetitive positioning accuracy, etc. guide rails of precision motion equipment such as CNC machine tools and coordinate measuring machines, as well as pitch angle, yaw angle, straightness, verticality, etc. guide rails.
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In short, the laser interferometer is a powerful measuring tool which can be widely used in parallelism and perpendicularity measurement work in various fields. Its emergence provides strong technical support for various scientific and precision manufacturing experiments.
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